Krishtab, MikhailMikhailKrishtabStassen, IvoIvoStassenStassin, TimotheeTimotheeStassinCruz, Alexander JohnAlexander JohnCruzOkudur, Oguzhan OrkutOguzhan OrkutOkudurArmini, SilviaSilviaArminiWilson, ChrisChrisWilsonDe Gendt, StefanStefanDe GendtAmeloot, RobRobAmeloot2021-10-272021-10-2720192041-1723https://imec-publications.be/handle/20.500.12860/33335Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectricsJournal articlehttps://doi.org/10.1038/s41467-019-11703-x