Swerts, JohanJohanSwertsArmini, SilviaSilviaArminiCarbonell, LaureLaureCarbonellDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetMertens, SofieSofieMertensSchaekers, MarcMarcSchaekersWitters, ThomasThomasWittersTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerVan Elshocht, SvenSvenVan ElshochtGravey, VirginieVirginieGraveyCockburn, AndrewAndrewCockburnShah, KavitaKavitaShahAubuchon, JosephJosephAubuchon2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18057Plasma enhanced atomic layer deposition of ruthenium ultra-thin films for advanced metallizationMeeting abstract