Rampelberg, GeertGeertRampelbergSchaekers, MarcMarcSchaekersMartens, KoenKoenMartensXie, QiQiXieDeduytsche, DavyDavyDeduytscheDe Schutter, BobBobDe SchutterBlasco, NicolasNicolasBlascoKittl, JorgeJorgeKittlDetavernier, ChristopheChristopheDetavernier2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/19656Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer depositionJournal article