Grillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisHeylen, NancyNancyHeylenDevriendt, KatiaKatiaDevriendtHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2596Propagation of within-die nonuniformity in CMPProceedings paper