Bottom-up nanoelectronic device fabrication by Area-Selective Deposition

Soethoudt, JobJobSoethoudtClerix, Jan-WillemJan-WillemClerixSanz-Matias, AnaAnaSanz-MatiasHarvey, JeremyJeremyHarveyDelabie, AnneliesAnneliesDelabie2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31828Bottom-up nanoelectronic device fabrication by Area-Selective DepositionOral presentation