Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodes

Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRooyackers, RitaRitaRooyackers2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8038Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodesJournal article