Gallagher, EmilyEmilyGallagherHendrickx, EricEricHendrickxKim, Ryan Ryoung hanRyan Ryoung hanKimLeray, PhilippePhilippeLerayPhilipsen, VickyVickyPhilipsenPollentier, IvanIvanPollentierRincon Delgadillo, PaulinaPaulinaRincon DelgadilloRonse, KurtKurtRonseTimmermans, MarinaMarinaTimmermansDe Simone, DaniloDaniloDe Simone2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35146EUV lithography and the materials that propel it forwardMeeting abstracthttps://www.euvlitho.com/2020/2020%20EUVL%20Workshop%20Keynote%20Gallagher.pdf