Vermeire, BertBertVermeireMertens, PaulPaulMertensMac Geary, M. J.M. J.Mac GearyKenis, KarineKarineKenisHeyns, MarcMarcHeynsSchaekers, MarcMarcSchaekersLubbers, A.A.Lubbers2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/443Effect of different chlorine sources during gate oxidationProceedings paper