Depth profiling intrinsically hybrid layers and organic/inorganic stacks by variable-size argon clusters: a ToF-SIMS and XPS study

Busby, YanYanBusbyNoel, CelineCelineNoelFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoFelten, AlexandreAlexandreFeltenHoussiau, LaurentLaurentHoussiau2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30346Depth profiling intrinsically hybrid layers and organic/inorganic stacks by variable-size argon clusters: a ToF-SIMS and XPS studyMeeting abstract