Claeys, CorCorClaeysMitard, JeromeJeromeMitardEneman, GeertGeertEnemanMeuris, MarcMarcMeurisSimoen, EddyEddySimoen2021-10-182021-10-1820100040-6090https://imec-publications.be/handle/20.500.12860/16887Si versus Ge for future microelectronicsJournal article