Giddings, Alexander DevinAlexander DevinGiddingsKoelling, SebastianSebastianKoellingShimizu, ShimizuShimizuShimizuEstivill, RobertRobertEstivillInoue, KojiKojiInoueVandervorst, WilfriedWilfriedVandervorstYeoh, Wai KongWai KongYeoh2021-10-252021-10-2520181359-6462https://imec-publications.be/handle/20.500.12860/30770Industrial application of atom probe tomography to semiconductor devicesJournal articlehttps://www.sciencedirect.com/science/article/pii/S1359646217305146