Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).

Baranov, GlebGlebBaranovMilenin, AlexeyAlexeyMileninBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26311Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).Journal article