Kaczer, BenBenKaczerWang, W. C.W. C.WangAfanasiev, ValeriValeriAfanasievPawlak, MalgorzataMalgorzataPawlakKim, Min-SooMin-SooKimTomida, KazuyukiKazuyukiTomidaDebusschere, IngridIngridDebusschereVan Elshocht, SvenSvenVan ElshochtAltimime, LaithLaithAltimimeKittl, JorgeJorgeKittl2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17338Investigation of leakage mechanisms in ALD Sr-rich SrTiO filmsProceedings paper