A water-tight packaging of MEMS electrostatic actuators for biomedical applications

Erismis, Mehmet AkifMehmet AkifErismisPereira Neves, HerculesHerculesPereira NevesDe Moor, PietPietDe MoorPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-1820100946-7076https://imec-publications.be/handle/20.500.12860/17082A water-tight packaging of MEMS electrostatic actuators for biomedical applicationsJournal article