Redzheb, MuradMuradRedzhebPrager, LutzLutzPragerKrishtab, MikhailMikhailKrishtabArmini, SilviaSilviaArminiVanstreels, KrisKrisVanstreelsFranquet, AlexisAlexisFranquetVan der Voort, PascalPascalVan der VoortBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/27202UV cure of oxycarbosilane low-k filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716300442