Shrinking solid-state nanopores and nanoslits using electron beam induced deposition with different precursors

Kox, RonaldRonaldKoxChen, ChangChangChenLagae, LiesbetLiesbetLagaeBorghs, GustaafGustaafBorghs2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15622Shrinking solid-state nanopores and nanoslits using electron beam induced deposition with different precursorsProceedings paper