Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

Li, YingyingYingyingLiBleiker, Simon J.Simon J.BleikerWorsey, ElliottElliottWorseyDagon, MaelMaelDagonEdinger, PierrePierreEdingerTakabayashi, Alain YujiAlain YujiTakabayashiQuack, NielsNielsQuackVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.GylfasonPamunuwa, DineshDineshPamunuwaNiklaus, FrankFrankNiklaus2025-07-202025-07-202025-JUL 12055-7434WOS:001527549500002https://imec-publications.be/handle/20.500.12860/45917Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry processJournal article10.1038/s41378-025-00964-wWOS:001527549500002ELECTRO-MECHANICAL SWITCHESRELAY TECHNOLOGYRELIABILITYDESIGNMEDLINE:40645929