Advantage of NW structure in preservation of SRB-induced strain and investigation of off-state leakage in strained stacked Ge NW pFET

Arimura, HiroakiHiroakiArimuraEneman, GeertGeertEnemanCapogreco, ElenaElenaCapogrecoWitters, LiesbethLiesbethWittersDe Keersgieter, AnAnDe KeersgieterFavia, PaolaPaolaFaviaPorret, ClémentClémentPorretHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooBender, HugoHugoBenderRagnarsson, Lars-AkeLars-AkeRagnarssonMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertMocuta, DanDanMocutaHoriguchi, NaotoNaotoHoriguchi2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30143Advantage of NW structure in preservation of SRB-induced strain and investigation of off-state leakage in strained stacked Ge NW pFETProceedings paperhttps://ieeexplore.ieee.org/document/8614712