Stress build-up during the Ni-silicidation in and around narrow silicide lines

Steegen, AnAnSteegenLauwers, AnneAnneLauwersChamirian, OxanaOxanaChamirianBender, HugoHugoBenderDe Wolf, IngridIngridDe Wolfde Potter de ten Broeck, MurielMurielde Potter de ten BroeckDe Tavernier, C.C.De TavernierMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4769Stress build-up during the Ni-silicidation in and around narrow silicide linesOral presentation