Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Rawat, AmitaAmitaRawatBhuwalka, Krishna K.Krishna K.BhuwalkaMatagne, PhilippePhilippeMatagneVermeersch, BjornBjornVermeerschWu, HaoHaoWuHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaertLiu, ChangzeChangzeLiu2022-08-262022-05-152022-08-162022-08-2620211930-8876WOS:000790809500010https://imec-publications.be/handle/20.500.12860/39820Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process RisksProceedings paper10.1109/ESSDERC53440.2021.9631815978-1-6654-3748-6WOS:000790809500010