SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumes

Budrevich, Andre A.Andre A.BudrevichVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27938SIMS analysis on the transistor scale: probing composition and dopants in non-planar, confined 3D-volumesBook chapterwww.panstanford.com