Rudra, SukumarSukumarRudraRoels, JorisJorisRoelsBryce, GeorgeGeorgeBryceHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouwVan Thourhout, DriesDriesVan Thourhout2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17915SiGe based grating light valves: a leap towards monolithic integration of MOEMSJournal article