Photolithographic patterning of organic photodetectors with a non-fluorinated photoresist

Malinowski, PawelPawelMalinowskiNakamura, AtsushiAtsushiNakamuraJanssen, DimitriDimitriJanssenKamochi, YoshitakaYoshitakaKamochiKoyama, IchiroIchiroKoyamaIwai, YuYuIwaiStefaniuk, AnnaAnnaStefaniukWilenska, EwelinaEwelinaWilenskaSalas Redondo, CaterinCaterinSalas RedondoCheyns, DavidDavidCheynsSteudel, SoerenSoerenSteudelHeremans, PaulPaulHeremans2021-10-222021-10-2220141566-1199https://imec-publications.be/handle/20.500.12860/24188Photolithographic patterning of organic photodetectors with a non-fluorinated photoresistJournal articlehttp://www.sciencedirect.com/science/article/pii/S1566119914002808