Mack, ChrisChrisMackLorusso, GianGianLorussoDe Simone, DaniloDaniloDe SimoneSeveri, JorenJorenSeveri2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35515Characterizing variation in EUV contact hole lithographyProceedings paperhttps://doi.org/10.1117/12.2572834