Baklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1718Applicability of HF solutions for the cleaning of TiSi2 surfaceProceedings paper