Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates

Ragnarsson, Lars-AkeLars-AkeRagnarssonChang, VincentVincentChangYu, HongYuHongYuYuCho, Hag-JuHag-JuChoConard, ThierryThierryConardYin, KaiMinKaiMinYinDelabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsSchram, TomTomSchramDe Gendt, StefanStefanDe GendtBiesemans, SergeSergeBiesemans2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/12755Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicatesJournal article