Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns

Singh, ArjunArjunSinghChan, BTBTChanParnell, DoniDoniParnellWu, HengpengHengpengWuLin, JianJianLinCao, YiYiCaoGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25917Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patternsProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2086352