Dubuc, D.D.Dubucvan Spengen, MerlijnMerlijnvan SpengenMelle, S.S.MelleDe Wolf, IngridIngridDe WolfMertens, RobertRobertMertensPons, P.P.PonsGrenier, K.K.GrenierPlana, R.R.Plana2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8863Methodology to assess the reliability behavior of RF MEMSProceedings paper