Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

Nag, ManojManojNagMuller, RobertRobertMullerSteudel, SoerenSoerenSteudelSmout, SteveSteveSmoutBhoolokam, AjayAjayBhoolokamVaisman Chasin, AdrianAdrianVaisman ChasinMyny, KrisKrisMynyCobb, BrianBrianCobbSchols, SarahSarahScholsGenoe, JanJanGenoeKumar, AbhishekAbhishekKumarGelinck, GerwinGerwinGelinckFukui, YusukeYusukeFukuiGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24300Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTsProceedings paper