Boher, P.P.BoherEvrard, P.P.EvrardDefranoux, C.C.DefranouxDarragon, A.A.DarragonSun, LianchaoLianchaoSunFouere, J.C.J.C.FouereStehlé, J.L.J.L.StehléBellandi, E.E.BellandiBender, HugoHugoBender2021-10-152021-10-152003-12https://imec-publications.be/handle/20.500.12860/7239High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometryProceedings paper