Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM

Armini, SilviaSilviaArminiBurtovyy, RuslanRuslanBurtovyyLuzinov, IgorIgorLuzinovWhelan, CarolineCarolineWhelanMaex, KarenKarenMaexMoinpour, MansourMansourMoinpour2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11652Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFMJournal article