Lemaire, J. J.J. J.LemaireRajagopal, A.A.RajagopalGregoire, C.C.GregoirePireaux, J. J.J. J.PireauxBaklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaexWaeterloos, JoostJoostWaeterloos2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3614Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resinMeeting abstract