A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

Dialameh, MasoudMasoudDialamehScheerder, JeroenJeroenScheerderMorris, RichardRichardMorrisMeersschaut, JohanJohanMeersschautRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der HeideFleischmann, ClaudiaClaudiaFleischmann2021-10-312021-10-3120211431-9276https://imec-publications.be/handle/20.500.12860/36673A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe TomographyJournal article10.1017/S1431927621001240https://doi.org/10.1017/S1431927621001240