Process sensitivity analysis for EPE optimization of MP18 SALELE BEOL patterning

Soussou, AssawerAssawerSoussouKljucar, LukaLukaKljucarDusa, MirceaMirceaDusaMountsier, TomTomMountsierJurczak, GosiaGosiaJurczakLowe, BrettBrettLowe2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300102https://imec-publications.be/handle/20.500.12860/45956Process sensitivity analysis for EPE optimization of MP18 SALELE BEOL patterningProceedings paper10.1117/12.3051089978-1-5106-8639-7WOS:001514426300102