Ma, YuanshengYuanshengMaLei, JunjiangJunjiangLeiTorres, J. AndresJ. AndresTorresHong, LeLeHongWord, JamesJamesWordFenger, GermainGermainFengerTritchkov, AlexanderAlexanderTritchkovLippincott, GeorgeGeorgeLippincottGupta, RachitRachitGuptaLafferty, NealNealLaffertyHe, YuanYuanHeBekaert, JoostJoostBekaertVandenberghe, GeertGeertVandenberghe2021-10-222021-10-2220151932-5150https://imec-publications.be/handle/20.500.12860/25589Directed self-assembly graphoepitaxy template generation with immersion lithographyJournal article10.1117/1.JMM.14.3.031216