Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

Brüner, PhilippPhilippBrünerGrehl, T.T.GrehlJourdan, NicolasNicolasJourdanSteinbauer, E.E.SteinbauerBauer, P.P.BauerBrongersma, H.H.Brongersma2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25022Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriersMeeting abstract