Zhao, ChaoChaoZhaoDemuynck, StevenStevenDemuynckVan den Bosch, GeertGeertVan den BoschTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13267Barrier reliability for Cu contactsProceedings paper