Determination of Young's Modulus of porous low-k films by ellipsometruc porosimetry

Moguilnikov, KonstantinKonstantinMoguilnikovBaklanov, MikhaïlMikhaïlBaklanov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6620Determination of Young's Modulus of porous low-k films by ellipsometruc porosimetryJournal article