Mouroux, AlietteAlietteMourouxPalmans, RogerRogerPalmansKeinonen, J.J.KeinonenZhang, S. L.S. L.ZhangMaex, KarenKarenMaexPetersson, S.S.Petersson2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1367Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungstenProceedings paper