Negative bias temperature instabilities in HfSiO(N)-based MOSFETs: electrical characterization and modeling

Houssa, MichelMichelHoussaAoulaiche, MarcMarcAoulaicheDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12311Negative bias temperature instabilities in HfSiO(N)-based MOSFETs: electrical characterization and modelingJournal article