APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2

Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannVeloso, AnabelaAnabelaVelosoArnoldi, LaurentLaurentArnoldiKumar, ArulArulKumarBogdanowicz, JanuszJanuszBogdanowiczVurpillot, FrancoisFrancoisVurpillotVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26992APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2Oral presentation