Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates

Singh, ArjunArjunSinghSayan, SafakSafakSayanEl Otell, ZiadZiadEl OtellChan, BTBTChanGronheid, RoelRoelGronheid2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24534Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substratesMeeting abstract