Development of a GaN epi-stack on 200mm Si (111) for semi-vertical power devices

Liang, HuHuLiangStoffels, SteveSteveStoffelsGeens, KarenKarenGeensDecoutere, StefaanStefaanDecoutere2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28816Development of a GaN epi-stack on 200mm Si (111) for semi-vertical power devicesOral presentationhttp://www.european-mrs.com/sites/default/files/pdf/icns12_-_full_program.pdf