Shang, XiaobingXiaobingShangMissinne, JeroenJeroenMissinneTeigell Beneitez, NuriaNuriaTeigell BeneitezJablonski, MichalMichalJablonskiDe Smet, JelleJelleDe SmetJoshi, PankajPankajJoshiCuypers, DieterDieterCuypersBaghdasaryan, T.T.BaghdasaryanVervaeke, MichaelMichaelVervaekeThienpont, HugoHugoThienpontDe Smet, HerbertHerbertDe Smet2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25891Reverse replication of circular micro grating structures with soft lithographyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2436957