Mitard, JeromeJeromeMitardBellenger, FlorenceFlorenceBellengerWitters, LiesbethLiesbethWittersDe Jaeger, BriceBriceDe JaegerVincent, BenjaminBenjaminVincentNyns, LauraLauraNynsMartens, KoenKoenMartensVrancken, EviEviVranckenWang, GangGangWangLin, DennisDennisLinLoo, RogerRogerLooCaymax, MattyMattyCaymaxDe Meyer, KristinKristinDe MeyerHeyns, MarcMarcHeynsHoriguchi, NaotoNaotoHoriguchi2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19437Investigation of the electrical properties of Ge/high-k gate stack: GeO2 VS Si-capMeeting abstract