A novel deep submicron elevated source/drain MOSFET

Waite, Andrew MichaelAndrew MichaelWaiteKubicek, StefanStefanKubicekHoward, DaveDaveHowardCaymax, MattyMattyCaymaxDe Meyer, KristinKristinDe MeyerEvans, A.A.Evans2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3141A novel deep submicron elevated source/drain MOSFETProceedings paper