Bedier, MohammedMohammedBedierRottenberg, XavierXavierRottenbergAbdelRassoul, RoshdyRoshdyAbdelRassoulTilmans, HarrieHarrieTilmans2021-10-202021-10-202012-11https://imec-publications.be/handle/20.500.12860/20346RF MEMS switched parallel plate capacitor using imec-SiGe technologyProceedings paper