On the interaction between inter-metal dielectric reliability and electromigration stress

Li, YunlongYunlongLiBruynseraede, ChristopheChristopheBruynseraedeGroeseneken, GuidoGuidoGroesenekenMaex, KarenKarenMaexTokei, ZsoltZsoltTokei2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12477On the interaction between inter-metal dielectric reliability and electromigration stressProceedings paper