Ouyang, BolingBolingOuyangLi, YanLuYanLuLiKruidhof, MartenMartenKruidhofHorsten, RolandRolandHorstenBaets, RoelRoelBaetsvan Dongen, Koen W.A.Koen W.A.van DongenCaro, JacobJacobCaro2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35691Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensorProceedings paperhttps://doi.org/10.1117/12.2539573