The Study of the Influence of the Layer Resistivity of Thin Epitaxial Si Cells

Evrard, OlivierOlivierEvrardVermeulen, TomTomVermeulenPoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxLaermans, PatrickPatrickLaermansNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/151The Study of the Influence of the Layer Resistivity of Thin Epitaxial Si CellsProceedings paper